Keynote Lecture 1

12:10 PM - 1:00 PM JST(3:10 AM - 4:00 AM UTC)

[04aA03K] Photoelectron Beams From GaN-Type Semiconductors bring Innovations In
Semiconductor Manufacturing Process Metrology and Inspection

*Tomohiro Nishitani¹ (1. Photo electron Soul Inc. (Japan))