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Session Details

Keynote Lecture

Keynote Lecture 1

Tue. Mar 4, 2025 12:10 PM - 1:00 PM JST
Tue. Mar 4, 2025 3:10 AM - 4:00 AM UTC
Room A(Active Plaza)
Chair:Masashi Kato(Nagoya Institute of Technology)
12:10 PM - 1:00 PM JST(3:10 AM - 4:00 AM UTC)

[04aA03K]Photoelectron Beams From GaN-Type Semiconductors bring Innovations In
Semiconductor Manufacturing Process Metrology and Inspection

*Tomohiro Nishitani1 (1. Photo electron Soul Inc. (Japan))
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