Session Details
Keynote Lecture 1
Tue. Mar 4, 2025 12:10 PM - 1:00 PM JST
Tue. Mar 4, 2025 3:10 AM - 4:00 AM UTC
Tue. Mar 4, 2025 3:10 AM - 4:00 AM UTC
Room A(Active Plaza)
Chair:Masashi Kato(Nagoya Institute of Technology)
[04aA03K]Photoelectron Beams From GaN-Type Semiconductors bring Innovations In
Semiconductor Manufacturing Process Metrology and Inspection
*Tomohiro Nishitani1 (1. Photo electron Soul Inc. (Japan))