Plasma Scienec & Technologies 1

3:45 PM - 4:00 PM JST(6:45 AM - 7:00 AM UTC)

[04pA08O] In-Situ Analysis of Chlorination of Tin Surfaces by Chlorine Radical Irradiations

*Shunya Hirai¹, Kazunori Shinoda², Thi-Thuy-Nga Nguyen¹, Takayoshi Tsutsumi¹, Kenichi Inoue¹, Kenji Ishikawa¹ (1. Nagoya University (Japan), 2. Hitachi High-Tech Corp. (Japan))