Plasma Science & Technologies 3

6:30 PM - 6:45 PM JST(9:30 AM - 9:45 AM UTC)

[04pA13O] Surface Reactions by Deep Ultraviolet Laser Irradiation for GaN Etching

*Ryoto Takahashi¹, Takayoshi Tsutsumi¹, Kenichi Inoue¹, Ryusei Sakai¹, Makoto Sekine¹, Masaru Hori¹, Kenji Ishikawa¹ (1. Nagoya University (Japan))