Plasma Science & Technologies 3

6:45 PM - 7:00 PM JST(9:45 AM - 10:00 AM UTC)

[04pA14O] Effect of Sticking Probability on Radical Transports in High-Aspect-Ratio Holes

*Takumi Kurushima¹, Takayoshi Tsutsumi², Makoto Sekine², Masaru Hori², Kenji Ishikawa² (1. Nagoya University (Japan), 2. Center for Low temperature Plasma Sciences (Japan))