ISPlasma2025/IC-PLANTS2025
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6:00 PM - 6:30 PM JST
(9:00 AM - 9:30 AM UTC)
[06pA11I]
Science and Engineering of Novel Magnetron Sputtering and PECVD Sources for Thin Film Depositions
*Bibhuti Bhusan Sahu
1
, Nisha
1
, Salini Datta
1
(1. Indian Institute of Technology (IIT) (India))
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