ISPlasma2025/IC-PLANTS2025
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Mon. Mar 3, 2025
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6:30 PM - 6:45 PM JST
(9:30 AM - 9:45 AM UTC)
[06pA14O]
Fluorinated Alcohol-Based Plasma Etching to Reduce PFC Emissions
*Sanghyun You
1
, Jihyun Kim
2
, Chang-Koo Kim
1
(1. Ajou University (Korea), 2. Seoul National University (Korea))
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