Wide Band Gap Semiconductors 3

10:30 AM - 10:45 AM JST(1:30 AM - 1:45 AM UTC)

[06aC03O] Elastic- and Plastic-Deformation around Micro-Scraches on 4H-SiC Surface Evaluated by Micro-Raman Spectroscopy

Hiroyoshi Watanabe¹, Yuma Yasui¹, *Hiroyuki Iwata¹, Nobuhiko Sawaki¹ (1. Aichi Institute of Technology (Japan))