ISPlasma2026/IC-PLANTS2026
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[03P-02]
Antenna impedance tuning for enhanced power transfer and plasma density using a Faraday shield in inductively coupled plasma
*Hyun Lee
1
, Unjae Jung
1
, Woochul Yoon
1
, Chinwook Chung
1
(1. Hanyang University (Korea))
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