Presentation Information
[03P-05]Performance Enhancement of AlGaN/GaN MS-HEMTs Via Synergistic Oxygen Plasma Pre-treatment and TMA Surface Passivation
Zi-Hao Wang1, Chun-Yu Lin1, Liang-Jun Wang1, Shi-Cheng Huang1, Chiao-Yang Cheng1, *Shyh-Jer Huang2, Yi-Chi Lee3, Yan-Kuin Su1 (1. National Cheng Kung University (Taiwan), 2. National Formosa University (Taiwan), 3. Industrial Technology Research Institute (Taiwan))