Presentation Information
[03P-08]Simulation of VHF-CCP in Argon Discharge
*Cho-Jen Yang1, Ping-Yen Hsieh1, Ying-Hung Chen1, Yoshinobu Kawai1,2, Jia-Lin Syu3, Ju-Liang He1 (1. Feng Chia University (Taiwan), 2. Kyushu University (Japan), 3. C SUN Mfg. Ltd. (Taiwan))
