Presentation Information
[03P-52]Crack-free growth of sub-µm-thick CeO2 on mesa-patterned SOI substrates
*Tomohiro Inaba1, Xuejun Xu1, Takehiko Tawara2, Hiroo Omi3, Hideki Yamamoto1, Haruki Sanada1 (1. NTT BRL (Japan), 2. Nihon Univ. (Japan), 3. Yamato Univ. (Japan))