Presentation Information
[03P-79]Fabrication and Characterization of IGZO Thin-Film Transistors Using High-Power Impulse Magnetron Sputtering
Taketo Nagata1, Haruya Naganawa2, Kosuke Takenaka2, Yuichi Setsuhara2, *Takayuki Ohta1 (1. Meijo University (Japan), 2. Osaka University (Japan))