Presentation Information

[04aB05O]High-power Pulsed Magnetron Reactive Sputtering with Bias to Deposit Corrosion-Resistant TiCN Hard Film

*Chen-Feng Chang1, Hsi-Chao Chen1, Ming-Ying Wu1, Che-Hao Chen1, Cheng-Yu Chiang1 (1. NYUST (Taiwan))