Presentation Information
[04aB07O]Elucidating Primary Dissociation Mechanisms of C5H2F10, a Promising Etching Gas, Using Photoelectron-Photoion Coincidence (PEPICO) Measurements
*NGUYEN TRUNG TRAN1, Hiroshi Iwayama2, Toshio Hayashi 1, Takayoshi Tsutsumi1, Kenji Ishikawa1 (1. Center for Low-temperature Plasma Science, Nagoya University (Japan), 2. UVSOR Synchrotron Facility (Japan))