Presentation Information

[04pB11I]Cryogenic Atomic-Layer Processes Using Synergetic Reaction between HF and Plasma

*Shih-Nan Hsiao1, Makoto Sekine1, Yoshihide Kihara2, Ryutaro Suda2, Masaru Hori1 (1. Nagoya University (Japan), 2. Tokyo Electron Miyagi Ltd. (Japan))