Presentation Information
[04pB12O]Effect of Plasma Conditions on Radical Sticking Probability in High-Aspect-Ratio Holes
*Takumi Kurushima1, Takayoshi Tsutsumi2, Makoto Sekine2, Kenichi Inoue2, Kenji Ishikawa2 (1. Nagoya University (Japan), 2. Center for Low temperature Plasma Sciences (Japan))
