Presentation Information
[05aB05O]Verification of plasma irradiation conditions to increase the effect of reactive species in plasma CMP
*Yuto Sawayama1,2, Hideo Aida1, Hidetoshi Takeda1, Toshiro Doi3, Masaki Wada2, Chihiro Miyagawa2 (1. Nagaoka University of Technology (Japan), 2. Fujikoshi Machinery Corp. (Japan), 3. Doi Laboratory Inc. (Japan))