Presentation Information
[05pE09O]Real-time Analysis of Mass Spectrum of Neutral Species Spectrum by Optical Emission Spectroscopy in Hydrocarbon Plasma Using Machine Learning with Multivariate Data Analysis
*Kotaro Takahashi1, Yusuke Ando1, Takayoshi Tsutsumi2, Kenichi Inoue2, Makoto Sekine2, Kenji Ishikawa2 (1. Nagoya University (Japan), 2. Center for Low temperature Plasma Sciences (Japan))