[4E07-11] Plasma Science & Technologies-6 | ISPlasma2026/IC-PLANTS2026

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Invited & OralPlasma Science & Technologies

Plasma Science & Technologies-6

Thu. Mar 5, 2026 11:45 AM - 1:15 PM JST
Thu. Mar 5, 2026 2:45 AM - 4:15 AM UTC

Room E(N103)

Chair:Masaaki Matsukuma(TOKYO ELECTRON TECHNOLOGY SOLUTIONS LIMITED)

11:45 AM - 12:15 PM JST(2:45 AM - 3:15 AM UTC)

[05aE07I]Simulation-Based Analysis of Radical Generation in Atmospheric-Pressure Streamer discharges

*Atsushi Komuro¹ (1. National Institute of Advanced Industrial Science and Technology (Japan))

12:15 PM - 12:30 PM JST(3:15 AM - 3:30 AM UTC)

[05pE08O]Ion energy distribution function(IEDF) calculation for customized IEDF

*HyeonHo Nahm¹, ChinWook Chung¹ (1. Hanyang University (Korea))

12:30 PM - 12:45 PM JST(3:30 AM - 3:45 AM UTC)

[05pE09O]Real-time Analysis of Mass Spectrum of Neutral Species Spectrum by Optical Emission Spectroscopy in Hydrocarbon Plasma Using Machine Learning with Multivariate Data Analysis

*Kotaro Takahashi¹, Yusuke Ando¹, Takayoshi Tsutsumi², Kenichi Inoue², Makoto Sekine², Kenji Ishikawa² (1. Nagoya University (Japan), 2. Center for Low temperature Plasma Sciences (Japan))

12:45 PM - 1:00 PM JST(3:45 AM - 4:00 AM UTC)

[05pE10O]From Curated A&M Data to Validated Plasma Properties: Fundamental Activities at KFE’s DCPP

*Mi-Young Song¹, Nidhi Sinha¹, Hee-Jung Yeom¹, Yong-Hyun Kim¹, Young-Gi Kim¹, In Jae Kang¹, Heechol Choi¹, Jong-ha Lee¹, Jong-Sik Kim¹, Dae-Chul Kim Kim¹ (1. Korea Institute of Fusion Energy (Korea))

1:00 PM - 1:15 PM JST(4:00 AM - 4:15 AM UTC)

[05pE11O]Stress origins of hydrogenated amorphous carbon: density functional theory anddata-driven analysis study

*Yusuke Ando¹, Hu Li², Jianping Zhao², Masaaki Matsukuma³, Peter Ventzek², Kenji Ishikawa¹ (1. Nagoya University (Japan), 2. Tokyo Electron America, Inc. (USA), 3. Tokyo Electron Technology Solutions Ltd. (Japan))

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