Plasma Science & Technologies-6

1:00 PM - 1:15 PM JST(4:00 AM - 4:15 AM UTC)

[05pE11O] Stress origins of hydrogenated amorphous carbon: density functional theory anddata-driven analysis study

*Yusuke Ando¹, Hu Li², Jianping Zhao², Masaaki Matsukuma³, Peter Ventzek², Kenji Ishikawa¹ (1. Nagoya University (Japan), 2. Tokyo Electron America, Inc. (USA), 3. Tokyo Electron Technology Solutions Ltd. (Japan))