[EDP2] Digital, Quantum Information Technology, Materials and Fabrication

[EDP2-08] Impact of the fabrication process on internal losses in coplanar waveguide resonator based on nitride superconductors

*Satoru Mima¹, Hirotaka Terai¹, Yuji Hishida¹, Kazuyo Takaki¹, Mai Setoura¹, Shigehito Miki¹ (1. NICT - National Institute of Information and Communications Technology (Japan))

Keywords:

Superconducting qubit,Superconducting resonator

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