Presentation Information

[ED2-03-INV]Electromechanics based on ultra-high stressed titanium nitride membrane

*Yuki Matsuyama1, Shotaro Shirai2,1, Hirotaka Terai3, Yuji Hishida3, Atsushi Noguchi1,2,4 (1. Komaba Institute for Science in University of Tokyo (Japan), 2. RIKEN Center for Quantum Computing (Japan), 3. NICT (Japan), 4. InaRIS (Japan))

Keywords:

Optomechanics,Electromechanics,Mechanical resonators,Dissipation dilution,High-Q devices


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