Oral Session HP1

8:40 AM - 9:20 AM JST(11:40 PM - 12:20 AM UTC)

[HP1-01] High Power Impulse Magnetron Sputtering: From Fundamental Concepts to Industrial Applications

*Ralf Bandorf¹, Holger Gerdes¹, Stefan Körner¹, Dennis Barton¹, Ju-Liang He², Ying-Hong Chen², Pin-Yeng Hsieh², Thomas Schütte³ (1. Fraunhofer Institute for Surface Engineering and Thin Films IST, 2. Fraunhofer Innovation Platform for Surface and Production Engineering for Optical and Electrical Systems at Feng Chia University FIP-SPE@FCU, 3. PLASUS GmbH)