Oral Session HP1

9:20 AM - 9:40 AM JST(12:20 AM - 12:40 AM UTC)

[HP1-02] Influence of discharge parameters on the properties of TiO₂ films
grown by reactive bipolar HiPIMS discharges

*Stanislava Debnarova^1,2, Matthieu Michiels³, Stephanos Konstantinidis² (1. Faculty of Science, Masaryk University, 2. Plasma-Surface Interaction Chemistry, University of Mons, 3. Haute École en Heinaut)