Oral Session HP2

11:10 AM - 11:30 AM JST(2:10 AM - 2:30 AM UTC)

[HP2-02] Microsecond ion flux mapping in HiPIMS via magnetized QCM probe

*Charles Ballage¹, Anna Kapran^1,2, Ovidiu Vasilovici¹, Ahmed Bennacef^1,3, Tiberiu Minea¹ (1. Laboratoire de Physique des Gaz et Plasmas – LPGP, UMR 8578, Université Paris Saclay, CNRS, 91405, Orsay CEDEX, France, 2. Department of Low Temperature Plasma, Institute of Physics v. v. i., Academy of Sciences of the Czech Republic, Na Slovance 2, 182 21, Prague 8, Czech Republic, 3. Sorbonne Université – Faculté des Sciences et Ingénierie, 75005, Paris, France)