Presentation Information
[P1-04]Effects of Silicon Content on the Microstructural Evolution, Mechanical Properties, and Wear Behavior of Tantalum Silicon Nitride (TaSiN) Thin Films
*Yu Yao Yao1, Fang Bin Wu2 (1. Department of Materials Science and Engineering, National United University, Taiwan, 2. Glass and Optical Materials Research Center, National United University, Taiwan)