Presentation Information
[P1-09]Machine Learning Based Prediction of Compositional Characteristics and Film Properties of SiO₂ Thin Films
*Tsukasa Masamoto1, Sukma Wahyu Fitriani1, Yosei Kurosaki1, Yushi Sato1, Kunihiro Kamataki1, Masaharu Shiratani1 (1. Kyushu University)