Presentation Information
[P1-10]He-Induced Modification of Film Stress and Surface Morphology in a-C:H Films Deposited by C₂H₂/Ar PECVD
*Shunichi Takahashi1, Kazuki Nagamine1, Daichi Wakita1, Kunihiro Kamataki1, Takamasa Okumura1, Naho Itagaki1, Kazunori Koga1, Masaharu Shiratani1 (1. Graduate School of Information Science and Electrical Engineering, Kyushu University)