Presentation Information
[P1-19]Tunable Electrical and Mechanical Properties of Nitrogen-Doped Diamond-Like Carbon Films Synthesized by 60 MHz VHF-PECVD
*Pei-Cheng Jiang1, Chung-Tzu Chang1, Yang-Kuei Fan1, Cheng-Hsun-Tony Chang1 (1. Department of Electronic Engineering, Minghsin University of Science and Technology)