Presentation Information
[P1-21]Gas flow sputtering deposited very thick molybdenum film
Yi-Ning Chiu1, Ping-Yen Hsieh1, Ying-Hung Chen1, Ralf Bandorf2, *Ju Liang He1 (1. Feng chia university, 2. Fraunhofer Institute for Surface Engineering and Thin Films IST)