Presentation Information
[P2-01]Time-evolution characteristics of HiPIMS and m-HiPIMS using a MPP generator
*Masaomi Sanekata1, Yuki Nakagawa1, Hiroki Kobayashi1, Eisuke Yokoyama1,2, Masahide Tona3, Hiroaki Yamamoto3, Keizo Tsukamoto3, Kiyokazu Fuke4, Keijiro Ohshimo5, Fuminori Misaizu6 (1. Tokyo Polytechnic University, 2. Salesian Polytechnic, 3. Ayabo Corporation, 4. Kobe University, 5. Hokkaido University of Education, 6. Tohoku University)