Presentation Information
[P2-10]Analysis of ionization characteristics of sputtered particles in multi-pulse HiPIMS by optical emission spectroscopy
*Eisuke Yokoyama1,2, Yuki Nakagawa2, Hiroki Kobayashi2, Masaomi Sanekata2, Masahide Tona3, Hiroaki Yamamoto3, Keizo Tsukamoto3, Kiyokazu Fuke4, Keijiro Ohshimo5, Fuminori Misaizu6 (1. Salesian Polytechnic, 2. Tokyo Polytechnic University, 3. Ayabo Corporation, 4. Kobe University, 5. Hokkaido University of Education, 6. Tohoku University)