Presentation Information
[P2-11]Magnetron co-deposition of W layers in He/D2(H2)/Ar mixtures in DC and HiPIMS modes
*Andrey Kaziev1, Gleb Lomonosov1, Dobrynya Kolodko1,2, Alexander Tumarkin1, Maksim Kharkov1 (1. National Research Nuclear University MEPhI, 2. Kotelnikov Institute of Radio Engineering and Electronics, RAS, Fryazino Branch, Fryazino, Russia)