Presentation Information
[P2-13]Comparative Analysis of Ionized Flux Fractions and Deposition Rates in Unipolar, Bipolar, and Burst HiPIMS Discharges
*Yuya Eshita1, Martin Ondryas2, Peter Klein2, Daniel Lundin3, Tetsuhide Shimizu1 (1. Tokyo Metropolitan University, 2. Masaryk University, 3. Linköping University)