Presentation Information
[P2-15]Quartz Crystal Microbalance-Based Ion Flux Diagnostics for Optimization of HiPIMS Plasma Processes
*Anna Kapran1,2, Charles Ballage1, Zdeněk Hubička2, Tiberiu Minea1 (1. Laboratoire de Physique des Gaz et Plasmas – LPGP/ CNRS, 2. Department of Low Temperature Plasma, Institute of Physics v. v. i., Academy of Sciences of the Czech Republic)