International Symposium on Sputtering & Plasma Processes (ISSP2026)
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Tue. Jun 30, 2026
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[P2-21]
Role of Nitrogen Ion Flux in Phase Transformation of Boron Carbon Nitrides Deposited by Using HiPIMS
*Anwar Sulaiman Olfion
1
, Hayate Nagakura
1
, Shimizu Tetsuhide
1
(1. Tokyo Metropolitan University)
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