Presentation Information
[P2-24]Spectroscopic Diagnostics of Low-Pressure Argon Sputtering Plasmas Based on a Collisional–Radiative Model Including Copper Species
*Keren Lin1, Yuchen Ye2, Wataru Kikuchi2, Jun Enomoto2, Takeo Nakano1, Hiroshi Akatsuka2 (1. Seikei University, 2. Institute of Science Tokyo)