Presentation Information
[P2-26]Examination of Ion Irradiation Effects for Physical Characterization of Ni Thin Films Deposited on Plasma-Pretreated Fluoropolymer Substrates by Inductively Coupled Plasma Assisted Magnetron Sputtering with Multipolar Magnetic Plasma Confinement
*Tenma Eto1, Hiroshi Toyota1 (1. Hiroshima Institute of Technology)