Presentation Information
[P2-31]Study on the geometrically asymmetric capacitively coupled plasmas using global model simulations
*Chan-Won Park1,2, Hyo-Chang Lee3,4, Shin-Jae You1, Jung-Hyung Kim2 (1. Department of Physics, Chungnam National University, 2. Korea Research Institute of Standards and Science, 3. School of Electronics and Information Engineering, Korea Aerospace University, 4. Department of Semiconductor Science, Engineering and Technology, Korea Aerospace University)