Presentation Information
[P2-33]Reactive Gas-Phase Synthesis of Multicomponent Nitride Nanoparticles by High-Power Impulse Hollow Cathode Sputtering
*Muhammad Raza Zaidi1, Keiichi Takizawa1, Takeru Fujiki1, Hidetoshi Komiya1, Sebastian Ekeroth2, Rommel Paulo B. Viloan Viloan2, Robert Boyd2, Ulf Helmersson2, Tetsuhide Shimizu1 (1. Tokyo Metropolitan University, 2. linköping university)