Presentation Information
[P3-09]Effects of Annealing Atmosphere on the p-type Ni-doped Ga2O3 Thin Films via Reciprocated HiPIMS/RF Co-sputtering
*Ruo-Yan Huang1, Jia-Qi Xu1, Yu-Quan Zhu2, Shui-Yang Lien3, Pao-Hsun Huang1 (1. jimei university, 2. Southeast University, 3. Xiamen University of Technology)