Presentation Information
[P3-22]Experimental Study on the Adsorption and Desorption Behavior of Silicon-Based Precursors in Semiconductor Gas Delivery Lines
*Hyeonbin Kim1, Suyeon Kim1, Seeun Kim1, Sunghoon Baek2, Taehee Yeom2, Beomyoo Kim2, Sookyoung Hong2,1, Sungyun Jung2, Bumsuk Jung1 (1. Myoungji University, 2. Samsung Electronics)