Presentation Information
[P3-28]Plasma and Material Information Science–Based Machine Learning for Sputtering and PECVD Processes
*Kunihiro KAMATAKI1, Sukma Wahyu Fitriani1, Tsukasa Masamoto1, Yosei Kurokawa1, Yushi Sato1, Takamasa Okumura1, Naho Itagaki1, Kazunori Koga1, Masaharu Shiratani1 (1. Kyushu University)