Presentation Information
[P3-30]Effect of Ar Ion Etching on GaN Surfaces in Surface Analysis
*Takahiko Ikarashi1, Asami Yasui1, Chizuru Asahara1, Sara Mizuno1, Haruka Hidaka1, Shinya Yazaki2, Hideaki Mizusaki2, Tomohiro Sakata1 (1. Toray Research Center, Inc., 2. Nagano Prefecture General Industrial Technology Center)