Oral Session SP1

1:40 PM - 2:10 PM JST(4:40 AM - 5:10 AM UTC)

[SP1-01] Manipulating spokes in magnetron sputtering discharges

*Martin Rudolph¹, Wahyu Diyatmika¹, Oliver Rattunde², Edmund Schüngel², Dmitry Kalanov¹, Fabian Manke², Jörg Patscheider², André Anders^1,3 (1. Leibniz Institute of Surface Engineering (IOM), 2. Evatec AG, 3. Plasma Engineering LLC)