[SP1] Oral Session SP1 | International Symposium on Sputtering & Plasma Processes (ISSP2026)

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Oral Presentation1.Fundamentals of Sputtering and Plasma Physics

Oral Session SP1

Thu. Jul 2, 2026 1:40 PM - 3:20 PM JST
Thu. Jul 2, 2026 4:40 AM - 6:20 AM UTC

Oral(Science Hall)

1:40 PM - 2:10 PM JST(4:40 AM - 5:10 AM UTC)

[SP1-01]Manipulating spokes in magnetron sputtering discharges

*Martin Rudolph¹, Wahyu Diyatmika¹, Oliver Rattunde², Edmund Schüngel², Dmitry Kalanov¹, Fabian Manke², Jörg Patscheider², André Anders^1,3 (1. Leibniz Institute of Surface Engineering (IOM), 2. Evatec AG, 3. Plasma Engineering LLC)

2:10 PM - 2:40 PM JST(5:10 AM - 5:40 AM UTC)

[SP1-02]Knowledge-based Radio-frequency plasma processing

*HyoChang Lee¹ (1. Korea Aerospace University)

2:40 PM - 3:00 PM JST(5:40 AM - 6:00 AM UTC)

[SP1-03]Intermediate low-voltage discharge modes in the HiPIMS-to-arc transitions

*Andrey Kaziev¹, Nikolay Sazonov¹, Dobrynya Kolodko^1,2, Alexander Tumarkin¹, Maksim Kharkov¹ (1. National Research Nuclear University MEPhI, 2. Kotelnikov Institute of Radio Engineering and Electronics, RAS, Fryazino Branch)

3:00 PM - 3:20 PM JST(6:00 AM - 6:20 AM UTC)

[SP1-04]Investigation of particle fluxes impinging the substrate during a HiPIMS deposition from an alloy target

*Peter Klein¹, Jaroslav Hnilica¹, Martin Ondryáš¹, Gergely Lelovics¹, Petr Vašina¹ (1. Masaryk University, Brno, Czech Republic)

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