Presentation Information

[SP1-03]Intermediate low-voltage discharge modes in the HiPIMS-to-arc transitions

*Andrey Kaziev1, Nikolay Sazonov1, Dobrynya Kolodko1,2, Alexander Tumarkin1, Maksim Kharkov1 (1. National Research Nuclear University MEPhI, 2. Kotelnikov Institute of Radio Engineering and Electronics, RAS, Fryazino Branch)