Oral Session SP2

11:10 AM - 11:30 AM JST(2:10 AM - 2:30 AM UTC)

[SP2-02] Microwave-Induced Radical Passivation for High-Quality AlN Thin Films in Atomic Layer Deposition

*Jia-Qi Xu¹, Ruo-Yan Huang¹, Zong-Yue Li¹, Yi-Hui Lin¹, Lijuan Zhou¹, Wei-Hui Wang¹, Haixiang Huang², Guanglei Huang², Shui-Yang Lien³, Pao-Hsun Huang¹ (1. Jimei University, 2. XIAMEN JINGNAI TECH CO., LTD, 3. Xiamen University of Technology)