Oral Session TF2

11:50 AM - 12:10 PM JST(2:50 AM - 3:10 AM UTC)

[TF2-04] Substantial Improvement of Crystalline Quality in Sputtered Zn_1-xMg_xO Films on Sapphire Enabled by ZnO(N) Buffers

*Jocelyn Kezia Sutadharma¹, Hiroki Otsuyama¹, Hibiki Noguchi¹, Takamasa Okumura¹, Kunihiro Kamataki¹, Kazunori Koga¹, Masaharu Shiratani¹, Naho Itagaki¹ (1. Graduate School of Information Science and Electrical Engineering, Kyushu University)